| Acronym | Meaning |
 | NMIJ | National Metrology Institute Of Japan |
| BILE | Beam Induced Light Emission |
| CSMOS | Center For Subsurface Modeling Support |
| OASLM | Optically Addressed Spatial Light Modulator |
| RSC | Relative Source Contribution |
| GISAXS | Grazing Incidence Small Angle X-ray Scattering |
| SKPM | Scanning Kelvin Probe Microscopy |
| AESOP | Automated Electronic System For Ocean Pollution |
| HWS | Hazardous Waste Site |
| VALE | Vacuum Atomic Layer Epitaxy |
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