| Acronym | Meaning |
| RBSN | Reaction-bonded Silicon Nitride |
| CJII | Canadian Joint Implementation Initiative [with Regard To Greenhouse Gas Control] |
| CTOD | Crack Tip Opening Displacement |
| WHH | Width At Half Height [in X-ray Diffraction] |
| QDM | Quantum Defect Method |
| SCR | Selective Catalytic Reduction |
| CAR | Chemically Amplified Resist |
| RRGM | Recursive Residue Generation Method |
| ILEED | Inelastic Low-energy Electron Diffraction |
| MIBD | Micro-interferometric Backscatter Detection |