| Acronym | Meaning |
| PCA | Principal Component Analysis |
| TSC | Thermal Stimulated Current |
| LASER | Light Amplification By Stimulated Emission Of Radiation |
| CEN | Comite Europeen De Normalization |
| HVPE | Hydride Vapor Phase Epitaxy |
| IHF | Inhomogeneous Hartree-Fock |
| CAIR | Comprehensive Assessment Information Rule (USEPA) |
| SMIDG | Submicro Inverse-detection Gradient |
| LCOAO | Linear Combination Of Orthogonal Atomic Orbitals |
| SCHAZ | Subcritical Heat-affected Zone |